Journal
Fabrication of a Cone-Shaped Subwavelength Structures by Utilizing a Confined Convective Self-Assembly Technique and Inductively-Coupled-Plasma Reactive Ion Etching
Author : D. S. Kim, M. S. Park, and J. H. Jang
SourceJournal of Vacuum Science and Technology , vol. 29, no. 2, 020602, 2011.